F08400 - SEMI F84 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems StdTpc-undefined SEMI P44-0316 (technical revision)

SEMI P44-0316 (technical revision)

SEMI D67-0819 (Reapproved 0924)

条項の優先順位 — 本安全ガイドラインの複数セクションの規定が相互に矛盾する場合は，当該技術問題を特定して取り扱うセクションが，より一般的な他のセクションに優先する。

·    Thermal equipment

SEMI S10 — Safety Guideline for Risk Assessment

F08400 - SEMI F84 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems StdTpc-undefined SEMI P44-0316 (technical revision)This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical dimensions of three port components for 1. 125 inch type surface mount gas