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Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Constructional requirements

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Constructional requirements

g) liberated gases

a) users with an application independent generic cabling system and an open market for cabling components

Basic principles and uncertainties

weekly and regular control

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Constructional requirementsWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

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