E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded 18-0914 (Reapproved 1125)

18-0914 (Reapproved 1125)

The source is normally a polarized laser beam in combination with a high-contrast prism polarizer

This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user

6  This Guide also provides a measurement procedure for local bow

the user estimates all biases and variances associated with the equipment being compared under the specified operating conditions and with respect to the process characteristic(s) of interest

E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded 18-0914 (Reapproved 1125)This Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e. g., semiconductor fabrication) factory. This Document