F10700 - SEMI F107 - Guide for Process Equipment Adapter Plates Revision:SEMI F107-0309 - Inactive SEMI E57 — Mechanical Specification

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

storage or a combination of both transport and storage as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 11)

If present

warm up time

SEMI E40-0705 (technical revision)

F10700 - SEMI F107 - Guide for Process Equipment Adapter Plates Revision:SEMI F107-0309 - Inactive SEMI E57 — Mechanical SpecificationThis standard was technically approved by the global Facilities Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in February 2009. The purpose of the process equipment adapter plate guide is to provide guidance on the expectations and application for process equipment adapter plates. The use of adapter plates has been shown to reduce the time and cost