E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of

- Common approaches for defining specific elements of equipment metadata

BWSs may be classified as either temporarily bonded (i

and behavior are not required to be compliant to this Specification

SEMI D39-0704 (Reapproved 0117)

SEMI E87-0707 (technical revision)

SEMI F61 — Guide for Ultrapure Water Systems Used in Semiconductor Processing

semiconductor processes as reflected in a number of existing standards

Terms specific to this technology are either listed herein as they relate to the acceptance criteria of this Specification or are defined in the referenced documents as they relate to a specific test method

Packaging Requirements

Recommendations are made based on the cited literature

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The values given in parentheses are for information only