E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31

start year

and dead band of a thermal mass flow controller (MFC)

Appropriate information is summarized in § 5

SEMI E37-0222 (technical revision)

E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C This edition was approved forThis Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components