E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation StdPbc-0220 SEMI C28 — Specification for

SEMI C28 — Specification for Hydrofluoric Acid

It defines the view of the equipment through the SECS II link

This Document specifies how Sensor/Actuator/Controller devices interoperate on the network specific for the MOTIONNET Public specification referenced in the § 4

This array represents the front surface of the wafer when the back surface of the wafer is ideally flat

SEMI E143-0306 (Reapproved 0512)

E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation StdPbc-0220 SEMI C28 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 Within the semiconductor industry, the diversity and complexity of equipment creates difficult challenges for facilities design and equipment installation. This Guide should benefit equipment suppliers and