F07700 - SEMI F77 - 腐食性のガスシステムに使用される合金表面の電気化学的臨界孔食温度のテスト方法 StdPbc-0309 Boron-Doped
$115.50
Description
Boron-Doped
The electromagnetic susceptibility requirements are extracted from MIL-STD-461G
This Document describes a set of etch test structures for characterizing the performance of DRIE process tools
SEMI D74-0116 (first published)
The oxygen concentration obtained using this Test Method assumes a linear relationship between the interstitial oxygen concentration and the absorption coefficient of the 1107 cm1 band associated with interstitial oxygen in silicon
F07700 - SEMI F77 - 腐食性のガスシステムに使用される合金表面の電気化学的臨界孔食温度のテスト方法 StdPbc-0309 Boron-Dopedglobal Gases Committee20091216global Audits and Reviews Subcommittee20102www. semi. org20037 CPT ASTM G150 4. 1SEMI 4. 1 Referenced SEMI Standards None.
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