F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems Revision:SEMI F31-0313 - Superseded previously published March 2006

previously published March 2006

support equipment

and qualification methods for liquid chemical blending equipment

but may also be useful in other applications

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12

F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems Revision:SEMI F31-0313 - Superseded previously published March 2006NOTICE: This Standard was completely rewritten in 2024. 1 Purpose 1. 1 This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS. 2 Scope 2. 1 This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes. Referenced Standards and Documents (purchase separately) SEMI F39 Guide for