C10300 - SEMI C103 - Guide for Reporting Performance Parameters of the Chemical Mechanical Planarization (CMP) Conditioning Disks Used in Semiconductor Manufacturing StdPbc-0324 and components that contain and

and components that contain and distribute fluid

SEMI MF374

Attendees will learn about the different types classes of conductive inks available

org in July 2001

使用本文件是为了确保各工艺设备供应商或关键腔室部件（CCC）制造商提供的结果报告一致性。

C10300 - SEMI C103 - Guide for Reporting Performance Parameters of the Chemical Mechanical Planarization (CMP) Conditioning Disks Used in Semiconductor Manufacturing StdPbc-0324 and components that contain andThis Guide provides measurements and reporting of the parameters of disk aggressiveness, pad surface topography, disk surface topography and changes of the geometry of the disk features that are in contact with the pad during conditioning. This Guide provides measurements and reporting of the changes of aggressiveness and surface topography during the pad conditioning. This Guide provides for optimal sequence of the conditioning tests for multiple