E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment the user of this Document

the user of this Document can generate specifications for silicon annealed wafers

orgで入手可能となる。初版は2009年11月に発行された。

Changes were made to ¶ 7

Although it is recognized that the materials of construction and the adhesives used to apply the label must be selected with this use in mind

규약 및 표기법을 제공한다

E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment the user of this Document1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this