E08000 - SEMI E80 - マスフローコントローラの姿勢感度(取付位置)決定の試験方法 Revision:SEMI E80-0299 (Reapproved 0710) - Superseded previously published November 2009
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Description
previously published November 2009
This Standard specifies measurement methods
general contractors
If differences should exist between the English version and a translation in any other language
本スタンダードは,FPD用カラーフィルタの耐薬品性を評価するための試験方法を2つ規定する。一方は,定性的であり,もう一方は定量的なものである。
E08000 - SEMI E80 - マスフローコントローラの姿勢感度(取付位置)決定の試験方法 Revision:SEMI E80-0299 (Reapproved 0710) - Superseded previously published November 2009global Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1999200411 MFC MFC Referenced SEMI Standards None.
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