E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology SEMI E70-1213 (technical revision)

SEMI E70-1213 (technical revision)

This Practice is intended for use with all silicon wafer sizes and types when measuring uniformity of film properties and characteristics

and applied voltage together with the breakdown voltage of a mercury silicon contact

org in February 2010

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology SEMI E70-1213 (technical revision)global Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.