E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded 300 mm load ports

300 mm load ports

SEMI E133-0307 (technical revision)

3-0298 (technical revision)

measurement relevance

voltage sensitivity

E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded 300 mm load portsThe purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self Description. The scope of this Specification includes: Common approaches for defining specific elements of equipment metadata The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor