E14200 - SEMI E142 - Specification for Substrate Mapping StdTpc-Silicon on Insulator The purpose of this Document

The purpose of this Document is to standardize requirements for hexamethyldisilazane used in the semiconductor industry and testing procedures to support those standards

The intent of this Document is not to suggest any specific testing program but to specify the test method to be used when testing for parameters that are covered by this method

This Standard covers a definition and usage of secure

These test methods apply to liquid chemical and UPW system components intended for use in semiconductor manufacturing tools and ancillary equipment

This Standard specifies the testing procedures and test equipment required for the following:

E14200 - SEMI E142 - Specification for Substrate Mapping StdTpc-Silicon on Insulator The purpose of this Document1 Purpose 1. 1 This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays. 2 Scope 2. 1 This version of the Specification applies to the substrate types: wafers, frames, strips, and trays. 2. 2 This Specification addresses assembly and packaging including the testing of semiconductor devices. Subordinate Standards (included) SEMI E142. 1 Specification for