E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded 35-89 (technical revision)

35-89 (technical revision)

These test methods are also useful for research and development as well as applicability assessment of cleaning agents for the surface of FPDs

本方法は，破壊検査である。

as needed to capture the unique data parameters available from each

本試験方法は，global Compound Semiconductor Committeeで技術的に承認されている。現版は2005年11月29日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年1月にwww

E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded 35-89 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical