F08000 - SEMI F80 - Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System StdTpc-Physical Interfaces critical pitting temperature) in addition

critical pitting temperature) in addition to a qualitative (i

orgで，そして2006年7月にCD-ROMで入手可能となる。初版は1993年発行，前版は2000年10月発行。

which is biologically and ecologically very hazardous

SEMI G41-87 (first published)

1  The first purpose of this Specification and Guide is to standardize requirements for Grades of sulfuric acid used in the semiconductor industry and to document testing procedures that may be used to support those requirements

F08000 - SEMI F80 - Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System StdTpc-Physical Interfaces critical pitting temperature) in additionThis Document is a guide to a test method to determine gas change purge efficiency of gas delivery system. It covers both conventional metal face sealing and surface mount gas delivery systems. This Test Method applies to all type of high purity gas delivery systems used in semiconductor manufacturing facilities and comparable research and development areas. Referenced SEMI Standards None.