F09900 - SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube Revision:SEMI F99-0705 - Inactive SEMI M53-0216 (technical revision)

SEMI M53-0216 (technical revision)

This Document defines the method of FPD glass substrate surface roughness measurement by stylus method surface roughness measurement instrument

FPD製造装置で0

SEMI MF1810-1110 (Reapproved 0222)

1-0703 (Reapproved 1109) - テスト特定装置モデル（TSEM）のSECS-II プロトコル仕様

F09900 - SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube Revision:SEMI F99-0705 - Inactive SEMI M53-0216 (technical revision)This specification was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www. semi. org in June 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to