E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded or are looking for company-wide

or are looking for company-wide access

SEMI E123 — Specification for Handler Equipment Specific Equipment Model (HSEM)

装置サプライヤが提供すべき文書

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

and professionals with elementary background in science and knowledge of operating computers

E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded or are looking for company-wideE This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,