E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface StdPbc-0713 This guide was technically approved

This guide was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the Japanese Flat Panel Display Equipment Committee

装置内に組み込まれた情報システム部品

this document defines terms and metrics needed for quantifying the waviness of CSW

To define the specification and analytical methods and validate the specifications for BCl3

12-86 (technical revision)

E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface StdPbc-0713 This guide was technically approvedIn order to more efficiently facilitate the integration of process control systems (PCS) such as run to run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including