E12800 - SEMI E128 - Specification for XML Message Structures StdPbc-0417 SEMI M40-1114 (Reapproved 1023)

SEMI M40-1114 (Reapproved 1023)

Separate limits are given for the parts of the equipment in the main fab and in the subfab

previously published January 2017

SEMI E88-0702 (technical revision)

as specified by SEMI M74

E12800 - SEMI E128 - Specification for XML Message Structures StdPbc-0417 SEMI M40-1114 (Reapproved 1023)This Standard specifies XML structures required to encode message header or envelope information for synchronous and asynchronous messages. XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas. XML is also used to structure information needed to route and deliver messages between applications. A standard for message headers is required to avoid development and