E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded but the precision estimate was

but the precision estimate was taken from data on chemical-mechanical polished surfaces

SEMI E69-0298 (Reapproved 0913)

装置情報システムによってサポートされるべき役割

SEMI T9 — Specification for Marking of Metal Lead-Frame Strips with a Two-Dimensional Data Matrix Code Symbol

the customer may want to reference SEMI M1

E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded but the precision estimate wasThe purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment. It is a guide for establishing electrostatic compatibility of equipment used in semiconductor manufacturing. Electrostatic compatibility in the entire semiconductor factory is addressed in SEMI E129. Electrostatic surface charge causes a number of undesirable effects in semiconductor