E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded approaches suitable for use in

approaches suitable for use in smaller facilities are outlined in Related Information 1

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

These dimensions apply to substrates that are principally used in fabricating AMLCD displays

SEMI S13 — Environmental

This Guide is intended for facilities engineers

E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded approaches suitable for use inNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI 3100 mm125 mm150 mm200 mm 3100 mm125 mm150 mm 125 mm 200 mm Referenced SEMI Standards (purchase separately) None.