S00400 - SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets Revision:SEMI S4-0304 - Inactive SEMI E88-0702 (technical revision)

SEMI E88-0702 (technical revision)

the oxygen precipitation characteristics of the silicon wafer can significantly affect both yields and performance

輸送系統及模組／輔助設備（第13節）

SEMI E120 — Specification for the Common Equipment Model (CEM)

parallel interface for carrier transfer (SEMI E84)

S00400 - SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets Revision:SEMI S4-0304 - Inactive SEMI E88-0702 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Safety Guideline provides a method for determining cylinders of which types of chemicals should be in separate gas cabinets and which cylinders may be in gas cabinets with each other. This Safety Guideline is intended