M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded SEMI E140 — Guide to

SEMI E140 — Guide to Calculate Cost of Ownership Metrics for Gas Delivery Systems

Secondary ion mass spectrometry (SIMS) can measure on polished silicon wafer product the following:

1-0698 (first published)

Two representative two-wafer stacks are depicted in Figure 1 and Figure 2

and two classes of larger diameter test wafers (from 150 mm)

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded SEMI E140 — Guide toThis Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which