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M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 StdVol-Safety Guidelines for both front opening shipping

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for both front opening shipping box (FOSB) labels and bag labels

interfaces

Knowledge of these characteristics can help the supplier and customer determine if the dimensional characteristics of a particular wafer satisfy given geometrical requirements

For the purpose of this test HCl is the preferred test gas

SEMI E128 – Specification for XML Messaging

M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 StdVol-Safety Guidelines for both front opening shippingGaAs Referenced SEMI Standards None.

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