E17200 - SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) Revision:SEMI E172-1023 - Superseded SEMI E32 — Material Movement

SEMI E32 — Material Movement Management (MMM)

1  The SEMI E49 Subordinate Standards are organized by types of piping distribution systems: gas

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SEMI C44-0514 (technical revision)

with an MFC that has been equalized to ambient conditions for 24 hours before the application of power

E17200 - SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) Revision:SEMI E172-1023 - Superseded SEMI E32 — Material Movement* This Standard has the option to purchase the Current document with a Redline document (Current + Redline). The Redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the Redline document and the Current document, the Current version is the official and authoritative version. The