TEL Tokyo Electron LHP Low Temperature Hot Plate Process Station Lithius Working B / 02-71917

B / 02-71917

Part No: 501105-R

Inventory # G8471

Part No: SCM-00-25B175-P7

This IGC Polycold Systems 264594C is used working surplus

TEL Tokyo Electron LHP Low Temperature Hot Plate Process Station Lithius Working B / 02-71917TEL Tokyo Electron LHP Low Temperature Hot Plate Process Station Lithius Working Part No: LHP Low Temperature Hot Plate Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List: Assembly Part No: 5087 401692 19 BASE(HP) ASSY,BACK PIN(LHP) ASSY 5087 401693 14 SUPPORT ASSY 5085 407314 12 BASE(E LHP) ASSY 5087 401375 16 COVER(HP) ASSY 5085 407301 12 PLATE ASSY 5085 402639 13 CHAMBER (LHP) ASSY 5085 407323 15