F11300 - SEMI F113 - Test Method for Pressure Transducers Used in Gas Delivery Systems Revision:SEMI F113-1116 - Current Rough surfaces have been known

Rough surfaces have been known to contribute to the shedding of particles

This Specification defines a treatment of RAM and utilization measurement for MPCTs by first defining performance of IPSs as a function of equipment module-level performance

業界内のニーズと，セキュリティの評価方法を表現し，その一貫した理解を得るための共通言語を提供する。

NOTICE: This document was replaced by SEMI C58 in 2005

Assets to be secured (Equipment Information Asset)

F11300 - SEMI F113 - Test Method for Pressure Transducers Used in Gas Delivery Systems Revision:SEMI F113-1116 - Current Rough surfaces have been knownThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17, 2016. Available at www. semiviews. org and www. semi. org in November 2016. The purpose of this Document is to outline the test method for electronic pressure transducers used in gas delivery systems for semiconductor processing. This Document describes the procedures for