P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes regardless of design or development

regardless of design or development date

for which Instrumental Neutron Activation Analysis (INAA) is one method of choice

SEMI C30-0301 (technical revision)

5  The Standard includes practical methodologies of flux

It has been replaced by SEMI F119

P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes regardless of design or developmentThis guideline was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain