E05411 - SEMI E54.11 - エンドポイントデバイスのための特定デバイスモデル Revision:SEMI E54.11-1106 (Reapproved 1211) - Superseded The intention of this Document

The intention of this Document is to define a set of requirements and features to enable interoperability of load ports and carriers without limiting innovative solutions

These test methods are also useful for research and development as well as applicability assessment of cleaning agents for the surface of FPDs

This Document provides basic interface requirements for automated substrate handling

For measurement

2 — Specification for SECS II Protocol for Substrate Mapping

E05411 - SEMI E54.11 - エンドポイントデバイスのための特定デバイスモデル Revision:SEMI E54.11-1106 (Reapproved 1211) - Superseded The intention of this Documentglobal Information & Control Technical Committee2011912global Audits and Reviews Subcommittee201112www. semiviews. org www. semi. org2001200611 SEMI E54 : SEMI EPD Referenced SEMI Standards SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E54 Sensor Actuator Network Standard SEMI E54. 1 Standard for Sensor Actuator Network Common Device Model