Semiconductor Chemical Safety Part 2: Hazards, Controls and Emergency Actions StdPbc-0324 to be published November 2002

to be published November 2002

2  This Standard is intended to provide an overview of design considerations and hermetic packaging with particular emphasis on the evaluation of permeation of MEMS hermetic packages having internal cavity volumes that are very small compared to conventional packages

This document describes the components and minimum performance criteria for gas source control equipment used with hazardous production material (HPM) semiconductor gases

and traditional tools

and measurement techniques are described in this Standard

Semiconductor Chemical Safety Part 2: Hazards, Controls and Emergency Actions StdPbc-0324 to be published November 2002Course Description There are many chemicals you may be exposed to in semiconductor fabrication work. Each chemical has specific characteristics, hazards, and safety measures. Take this course to learn what these chemicals are and how to protect yourself. Ideal learners are semiconductor employees. Course Objectives Know about the chemical hazards in semiconductor fabrication facilities. Recognize common hazard controls in semiconductor fabrication