F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive SEMI F27-0997 (first published)

SEMI F27-0997 (first published)

This Test Method does not include all the information needed to complete HR-GDMS analyses

Parameters such as edge length and diagonal of a wafer appear to be obvious

• Flow Coefficient

• Equipment and load port access mode switching

F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive SEMI F27-0997 (first published)This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www. semi. org September 2001; to be published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the