E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded Equipment intended for further productive

Equipment intended for further productive use includes that being offered for reuse

SEMI MF1630-00 (first SEMI publication)

and oxidizing gas

and inspection information obtained by devices such as wafer inspection equipment and review tools

Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation

E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded Equipment intended for further productiveNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Guide describes technical architecture choices that enable application components to cooperate in a computer integrated manufacturing (CIM) environment and reduce the effort required to integrate those components into