Surface Preparation & Cleaning Conference (SPCC) 2026 StdPbc-0516 SEMI E87-0707 (technical revision)
$900.00
Description
SEMI E87-0707 (technical revision)
SEMI G32 — Guideline for Unencapsulated Thermal Test Chip
1 — Specification for SOAP Implementation of Equipment Self Description
The purpose of this Document is to provide a baseline for publication of chemical amplified (CA) photoresist parameters
本仕様では,半導体および電子デバイスの製造に使用される円盤状100 mm高純度単結晶ゲルマニウムウェーハの基板に関する要求事項をカバーする。
Surface Preparation & Cleaning Conference (SPCC) 2026 StdPbc-0516 SEMI E87-0707 (technical revision)
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