G03800 - SEMI G38 - 静止空気および強制風冷によるICパッケージのジャンクション部周囲間の熱抵抗の測定法 StdPbc-0720 and mechanical properties of FPD

and mechanical properties of FPD substrates

5 — Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment

SEMI D20-0706 (Reapproved 0815)

SEMI D50-0707 (first published)

to be published February 1999

G03800 - SEMI G38 - 静止空気および強制風冷によるICパッケージのジャンクション部周囲間の熱抵抗の測定法 StdPbc-0720 and mechanical properties of FPDglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1987200411 : IC Referenced SEMI Standards SEMI G32 Guideline for Unencapsulated Thermal Test Chip SEMI G42 Specification for Thermal Test Board Standardization for Measuring Junction to Ambient Thermal Resistance of Semiconductor Packages