T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded The accuracy of the critical

The accuracy of the critical dimensions of the notch controls the possible accuracy of the alignment

These devices classify by size and count

a fitting body temperature range of 23°C to 125°C (73°F to 257°F) should be maintained

SEMI M40 — Guide for Measurement of Roughness of Planar Surfaces on Silicon Wafers

Now think about the different types of hazardous energy used to operate that equipment

T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded The accuracy of the criticalNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI global Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org200511 EUV SEMI P37SEMI P386 6 Referenced SEMI Standards SEMI P37 Specification for Extreme Ultraviolet Lithography Mask Substrates SEMI P38