G02300 - SEMI G23 - Test Method of Inductance for Internal Traces of Semiconductor Packages StdPbc-0118 3 A simple tuning mechanism

3  A simple tuning mechanism is provided for limited feedforward and feedback control between process steps

SEMI MF1763-0706 (technical revision)

AMHS equipment including AGV

orgで入手可能になり。初版は1994年発行。

本スタンダードは，global Flat Panel Display – Factory Automation Committeeで技術的に承認されている。現版は2009年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年6月にwww

G02300 - SEMI G23 - Test Method of Inductance for Internal Traces of Semiconductor Packages StdPbc-0118 3 A simple tuning mechanismThis Test Method describes the measurement method for the inductance of internal traces of semiconductor packages. This Test Method is applicable for the measurement of package inductance that is greater than 0. 5 nH. This Test Method describes the measurement of a pin grid array, one of the package types, as a sample. This Test Method is also applicable to other types of packages. The inductance in this Standard is limited to that of internal traces