P04200 - SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様 StdPbc-0801 SEMI MF84-0312 (Reapproved 1023)

SEMI MF84-0312 (Reapproved 1023)

It is assumed for the purposes of this Guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef

Ease of Use

SEMI D6 — Standard Size and Thickness for Flat Panel Display Mask Substrates

and NH4F aqueous solutions

P04200 - SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様 StdPbc-0801 SEMI MF84-0312 (Reapproved 1023)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2009Japanese Regional Standards Committee20042www. semi. org20043 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain