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M04100 - SEMI M41 - 電源デバイス/IC用シリコン・オン・インシュレーター(SOI)の仕様 StdPbc-1016 It expands the GEM standard

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It expands the GEM standard requirements and capabilities in the areas of state models (TSC

EPT defines concepts

An EPT state model that defines triggers for state changes

NOTICE: This Document was balloted and approved for withdrawal in 2008

The information from this test will be of value in rating flash performance of any given compound to that in production use

M04100 - SEMI M41 - 電源デバイス/IC用シリコン・オン・インシュレーター(SOI)の仕様 StdPbc-1016 It expands the GEM standardglobal Silicon Wafer Committee2007425global Audits and Reviews Subcommittee20076www. semi. org20077CD ROM20006200111 ICSOI Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M34 Guide for Specifying SIMOX Wafers SEMI M53 Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Polystyrene Latex Spheres on Unpatterned

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