P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 주의: "참고:" 는 본 문서의

주의: "참고:" 는 본 문서의 공식적인 내용이 아니며

SEMI MF95-1107 (technical revision)

SEMI E87-0301 (technical revision)

SEMI PV64-0714 (Reapproved 0121)

production equipment including process and metrology equipment

P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 주의: "참고:" 는 본 문서의This checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain