M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers Revision:SEMI M22-0303 (Withdrawn 0307) - Withdrawn This document describes standard behaviors

This document describes standard behaviors for automated transfer of substrates among automated material handling systems (AMHS) and equipment at FPD fabs

SEMI E28 — Guide for Pressure Specifications of the Mass Flow Controller

orgで，そして2009年3月にCD-ROMで入手可能となる。初版は2002年11月に発行された。

however the definitions used are subject to interpretation

SEMI E39 — Object Services Standard (OSS)

M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers Revision:SEMI M22-0303 (Withdrawn 0307) - Withdrawn This document describes standard behaviorsThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1992; previously published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. Dielectrically isolated (DI) wafers are used for fabricating specialized