M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System Revision:SEMI M45-1110 - Superseded · Simultaneous transfer of Material

· Simultaneous transfer of Material and its Material Data between adjacent equipment

SEMI E157-0611 (Reapproved 0616)

Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers

本テストは，物理的原理に基づいた本スタンダードに対して予測値と一致するしないは別として，標準ガス状水分で供給された水分量を定量する。期待性能からの偏差が妥当であるかまたは疑わしいとき，そして必要と思われるときは，これらを使用状態に最初に設置する前に，本方法が標準水分を立証するのに使用されることを期待する。

and gain a consistent understanding within

M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System Revision:SEMI M45-1110 - Superseded · Simultaneous transfer of MaterialThis Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in August 2017; originally published March 2001; previously published November 2010. This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm