F05800 - SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Revision:SEMI F58-1000 - Superseded This specification defines thin-layer silicon-on-insulator

This specification defines thin-layer silicon-on-insulator (SOI) wafer requirements for CMOS large scale integrated circuit (LSI) devices

で技術的に承認されている。現版は2012年12月20日，global Audits and Reviews Subcommitteeにて発行が承認された。2013年4月にwww

The surface treatment chemistries are different for n- and p-type wafers

全ての要求条件に適合している製品に対しては，「SEMI仕様適合］と表記することができる。

The test methods described can be used to demonstrate the effectiveness of the static control methods

F05800 - SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Revision:SEMI F58-1000 - Superseded This specification defines thin-layer silicon-on-insulatorThis standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in June 2008. Originally published October 2000. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from