E11200 - SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles Revision:SEMI E112-1106 - Superseded Dimethyldimethoxysilane

Dimethyldimethoxysilane

Note: This Standard has been purposely restricted to 100 mm (4 in

SEMI E111-0303E (editorial revision)

1-0303 (first published)

The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model

E11200 - SEMI E112 - Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles Revision:SEMI E112-1106 - Superseded DimethyldimethoxysilaneNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given