MF008400 - SEMI MF84 - Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe Revision:SEMI MF84-1105 - Superseded SEMI S13 — Environmental

SEMI S13 — Environmental

ウェーハエッジ近傍形状は半導体素子工程の歩留に大きく影響する。

This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) Standard

3  This Test Method can be used for process control

its internal buffer space

MF008400 - SEMI MF84 - Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe Revision:SEMI MF84-1105 - Superseded SEMI S13 — EnvironmentalThis Test Method covers the measurement of the resistivity of silicon wafers with an in line four point probe. This Test Method describes a procedure that enables inter laboratory comparisons of the room temperature resistivity of silicon wafers. The precision that can be expected depends on both the resistivity of the wafer and on the homogeneity of the wafer. Round robin tests have been conducted to establish the expected precision for measurements