M03100 - SEMI M31 - Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers Revision:SEMI M31-0305 - Superseded 1-0698 (Reapproved 0706)

1-0698 (Reapproved 0706)

SEMI D6-1296 (technical revision)

development

SEMI E156-1115 (complete rewrite)

Direction for improvement for equipment manufacturers will become clear

M03100 - SEMI M31 - Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers Revision:SEMI M31-0305 - Superseded 1-0698 (Reapproved 0706)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the front opening shipping box (FOSB) used to ship 300 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality. This Standard is intended to