F04600 - SEMI F46 - Revision:Default Title Weight loss (see SEMI G75

Weight loss (see SEMI G75

SEMI E116 — Provisional Specification for Equipment Performance Tracking

9995% Quality -- used in the manufacture and processing of semiconductors and advanced electronic devices and circuits

including GaAs

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline

F04600 - SEMI F46 - Revision:Default Title Weight loss (see SEMI G75This guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been