E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded devices that may classify a

devices that may classify a process endpoint by determining the size and count of particles in the process environment

often require surface preparation prior to SPV measurements because SPV measurements are sensitive to surface conditions

2013년 4월 이후 www

org in May 2017

SEMI F39-1223 (complete rewrite)

E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded devices that may classify aNOTICE: This Standard is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. 1 Purpose 1. 1 This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects which are common to all vacuum pump devices (VPD) on a