US$ 12.40
G05300 - SEMI G53 - Specification for Metal Lid/Preform Assembly StdTpc-Stainless Steel Components SEMI E30-0303 (technical revision)
$193.00
Description
SEMI E30-0303 (technical revision)
Predict the microstructure and mechanical properties of steel
SEMI T3-0697E (editorial revision)
process flows
· プロセスカセットまたはクォーツボートとプロセスチェンバーの底面との間
G05300 - SEMI G53 - Specification for Metal Lid/Preform Assembly StdTpc-Stainless Steel Components SEMI E30-0303 (technical revision)This specification provides guidelines for the design and acceptance of metal lid preform assemblies. This specification may be used by suppliers at outgoing inspection and by the customers at incoming inspection. The design and acceptance criteria may be used for metal lid preform assemblies used on all types of semiconductor packages. Improper lid preform design and poorly specified lid preforms contributes to low sealing yields and unreliable
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